Раздел: Экологические дисциплины → Промышленная экология. Bookboon, 2014. — 307 p. — ISBN 978-87-403-0773-3. This book explains the two fundamental tools for process analysis and design - the material balance and the energy balance. A material balance is needed for virtually every pollution ...
Askar Rezvanov, Igor V. Matushkin, Oleg P. Gushin. Cellular automata model of O2 plasma treatment influence on the integral properties of SiOCH low-K dielectric. Proc. of Workshop "Plasma etch and strip in microelectronics", PESM-2015, Leuven, Belgium on April 27 to 28, 2015. - Leuven, Belgium, 2015.